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Volumn 1173, Issue , 2009, Pages 231-240

Aberration-corrected electron microscopy imaging for nanoelectronics applications

Author keywords

Deep sub Angstrom resolution; Image simulation; Scanning transmission electron microscopy; Transmission electron microscopy

Indexed keywords


EID: 70549099922     PISSN: 0094243X     EISSN: 15517616     Source Type: Conference Proceeding    
DOI: 10.1063/1.3251226     Document Type: Conference Paper
Times cited : (8)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.