Thin Dielectric Film Thickness Determination by Advanced Transmission Electron Microscopy

Microscopy and Microanalysis

Volumn 9, Issue 6, 2003, Pages 493-508

  Diebold, A C ^a   Foran, B ^a   Kisielowski, C ^b   Muller, D A ^c   Pennycook, S J ^d   Principe, E ^e   Stemmer, S ^f  

^a SEMATECH   (United States)

^b National Center for Electron Microscopy   (United States)

^c LUCENT TECHNOLOGIES   (United States)

^d OAK RIDGE NATIONAL LABORATORY   (United States)

^e APPLIED MATERIALS INC   (United States)

^f University of California   (United States)

Author keywords

HR TEM; STEM; Thickness determination; Thin films

Indexed keywords

EID: 0742323368     PISSN: 14319276     EISSN: None     Source Type: Journal    
DOI: 10.1017/S1431927603030629     Document Type: Article

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