Dimensional metrology for nanometre-scale science and engineering: Towards sub-nanometre accurate encoders

Nanotechnology

Volumn 15, Issue 10, 2004, Pages

  Heilmann, Ralf K ^a   Chen, Carl G ^a   Konkola, Paul T ^a   Schattenburg, Mark L ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

HETERODYNING; INTEGRATED CIRCUITS; INTERFEROMETERS; LASERS; LITHOGRAPHY; MEASUREMENTS; REFRACTOMETERS; SCANNING; SUBSTRATES;

COORDINATE MEASURING MACHINES (CMM); HETERODYNE LASER INTERFEROMETERS; OPTICAL ENCODING;

NANOTECHNOLOGY;

EID: 7044231637     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/15/10/002     Document Type: Conference Paper

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