Line scale comparison Nano3

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5190, Issue , 2003, Pages 122-133

  Bosse, Harald ^a   Häßler Grohne, Wolfgang ^a   Flügge, Jens ^a   Köning, Rainer ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

International comparison; Line scale; Measurement uncertainties; Metrology institutes; Reference values

Indexed keywords

CERAMIC MATERIALS; IMAGE CODING; LIGHT; SEMICONDUCTOR MATERIALS; SIGNAL ENCODING; THERMAL EXPANSION; VELOCITY MEASUREMENT;

INTERNATIONAL COMPARISON; LINE SCALE; MEASUREMENT UNCERTAINTIES; METROLOGY INSTITUTES; REFERENCE VALUES;

NANOTECHNOLOGY;

EID: 2342584134     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.506894     Document Type: Conference Paper

References (10)

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10. n-Criterion Used in Measurement Comparisons, PTB-Mitteilungen 109, 1/99, 24ff