High-resolution, high-speed, low data age uncertainty, heterodyne displacement measuring interferometer electronics

Measurement Science and Technology

Volumn 9, Issue 7, 1998, Pages 1024-1030

  Demarest, Frank C ^a  

^a ZYGO CORPORATION   (United States)

Author keywords

Heterodyne interferometry; Laser measurement systems; Phase meters; Photolithography

Indexed keywords

HETERODYNING; LASER APPLICATIONS; PHASE METERS; PHOTOLITHOGRAPHY; SEMICONDUCTOR DEVICE MANUFACTURE;

HETERODYNE INTERFEROMETRY; LASER MEASUREMENT SYSTEMS;

INTERFEROMETERS;

EID: 0032119598     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/9/7/003     Document Type: Article

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