Fabrication techniques for grating-based optical devices

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 6, 1999, Pages 3208-3211

  Lim, Michael H ^a   Murphy, T E ^a   Ferrera, J ^a   Damask, J N ^a   Smith, Henry I ^a  

^a Massachusetts Institute of Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0040708573     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590981     Document Type: Article

References (9)

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