UV-embossed inorganic-organic hybrid nanopillars for bioapplications

Journal of Nanoscience and Nanotechnology

Volumn 9, Issue 11, 2009, Pages 6710-6715

  Aura, S ^a   Jokinen, V ^a,b   Sainiemi, L ^a   Baumann, M ^b   Franssila, S ^a  

^a AALTO UNIVERSITY   (Finland)

^b UNIVERSITY OF HELSINKI   (Finland)

Author keywords

Embossing; Nanopillars; ORMOCER

Indexed keywords

BIOAPPLICATIONS; BLACK SILICON; EMBOSSING; EXPOSURE SOURCES; INORGANIC-ORGANIC HYBRID; LASER DESORPTION IONIZATION MASS SPECTROMETRY; MASK LESS; NANOPILLAR; NANOPILLARS; ORMOCER; POLYDIMETHYLSILOXANE PDMS; PROTOTYPING; SIZE RANGES; SOLVENT FREE; WAFER SCALE FABRICATION; WAFER-SCALE;

DESORPTION; HYBRID MATERIALS; MASS SPECTROMETERS; MASS SPECTROMETRY; MICROCHANNELS; SILICON WAFERS;

SILICONES;

INORGANIC COMPOUND; NANOMATERIAL; ORGANIC COMPOUND;

ARTICLE; CHEMISTRY; CONFORMATION; CRYSTALLIZATION; MACROMOLECULE; MATERIALS TESTING; METHODOLOGY; NANOTECHNOLOGY; PARTICLE SIZE; RADIATION EXPOSURE; SURFACE PROPERTY; ULTRASTRUCTURE; ULTRAVIOLET RADIATION;

CRYSTALLIZATION; INORGANIC CHEMICALS; MACROMOLECULAR SUBSTANCES; MATERIALS TESTING; MOLECULAR CONFORMATION; NANOSTRUCTURES; NANOTECHNOLOGY; ORGANIC CHEMICALS; PARTICLE SIZE; SURFACE PROPERTIES; ULTRAVIOLET RAYS;

EID: 70350314324     PISSN: 15334880     EISSN: None     Source Type: Journal    
DOI: 10.1166/jnn.2009.1356     Document Type: Article

References (28)

1. S. Turner, L. Kam, M. Isaacson, H. G. Craighead, W. Shain, and J. Turner, J. Vac. Sci. Technol, B 15, 2848 (1997).
2. P. Kim, D. H. Kim, B. Kim, S. K. Choi, S. H. Lee, A. Khademhosseini, R. Langer, and K. Y. Suh, Nanotechnology 16, 2420 (2005).
3. C.-J. Ting, M.-C. Huang, H.-Y. Tsai, C.-P. Chou, and C.-C. Fu, Nanotechnology 19, 205301 (2008).
4. Y. C. Jung and B. Bhushan, Nanotechnology 17, 4970 (2006).
5. N. H. Finkel, B. G. Prevo, O. D. Velev, and L. He, Anal. Chem. 77, 1088 (2005).
6. A. G. Nassiopoulos, S. Grigoropoulos, and D. Papadimitrious, Appl. Phys. Lett. 69, 2267 (1996).
7. P. R. Krauss and S. Y. Chou, J. Vac. Sci. Technol. B 13, 2850 (1995).
8. Y. Fu and N. K. A. Bryan, J. Vac. Sci. Technol., B 23, 984 (2005).
9. K. J. Morton, G. Nieberg, S. Bai, and S. Y. Chou, Nanotechnology 19, 345301 (2008).
10. J. Seekamp, S. Zankovych, A. H. Heifer, P. Maury, C. M. S. Torres, G. Böttger, C. Liguda, M. Eich, B. Heidari, L. Montelius, and J. Ahopelto, Nanotechnology 13, 581 (2002).
11. C. L. Cheung, R. J. Nikolic, C. E. Reinhardt, and T. F. Wang, Nanotechnology 17, 1339 (2006).
12. P. A. Lewis, H. Ahmed, and T. Sato, J. Vac. Sci. Technol. B 16, 2938 (1998).
13. L. Sainiemi, H. Keskinen, M. Aromaa, L. Luosujärvi, K. Grigoras, T. Kotiaho, J. Mäkelä, and S. Franssila, Nanotechnology 18, 505303 (2007).
14. X.-M. Zhao, Y. Xia, and G. M. Whitesides, J. Mater. Chem. 7, 1069 (1997).
15. K. Kuwabara and A. Miyauchi, J. Vac. Sci. Technol. B 26, 582 (2008).
16. X. Wang, Y. Chen, S. Banu, H. Morgan, S. Fu, and Z. Cui, Microelectron. Eng. 84, 872 (2007).
17. K. H. Haas and H. Wolter, Curr. Opin. Solid State Mater. Sci. 4, 571 (1999).
18. S. Aura, T. Sikanen, T. Kotiaho, and S. Franssila, Sens. Actuators, B 132, 397 (2008).
19. W.-S. Kim, K.-S. Kim, Y.-C. Kim, and B.-S. Bae, Thin Solid Films 476, 181 (2005).
20. M. Okinaka, K. Tsukagoshi, and Y. Aoyagi, J. Vac. Sci. Technol. B 24, 1402 (2006).
21. H. Jansen, M. de Boer, R. Legtenberg, and M. Elwenspoek, J. Micromech. Microeng. 5, 115 (1995).
22. B. K. Smith, J. J. Sniegowski, and G. LaVigne, Sens. Actuators, A 70, 159 (1998).
23. T. W. Odom, J. C. Love, D. B. Wolfe, K. E. Paul, and G. M. Whitesides, Langmuir 18, 5314 (2002).
24. H. Schmid and B. Michel, Macromolecules 33, 3042 (2000).
25. D. S. Peterson, Mass Spectrom. Rev. 26, 19 (2006).
26. F. Walther, P. Davydovskaya, S. Zurcher, M. Kaiser, H. Herberg, A. M. Gigler, and R. W. Stark, J. Micromech. Microeng. 17, 524 (2007).
27. V. Jokinen, L. Sainiemi, and S. Franssila, Adv. Mater. 20, 3453 (2008).
28. S. Alimpiev, A. Grechnikov, J. Sunner, V. Karavanskii, Y. Simanovsky, S. Zhabin, and S. Nikiforov, J. Phys. Chem. 128, 014711 (2008).