Direct nanoimprint of inorganic-organic hybrid glass

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 24, Issue 3, 2006, Pages 1402-1404

  Okinaka, Motoki ^a   Tsukagoshi, Kazuhito ^a   Aoyagi, Yoshinobu ^a,b  

^a RIKEN   (Japan)

^b Tokyo Institute of Technology ^*  (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

NANOTECHNOLOGY; OPTIMIZATION; POLYSILANES; SILICA; THERMAL EFFECTS;

INORGANIC PATTERNING METHODS; INORGANIC-ORGANIC HYBRID GLASS; POLYSILANE POLYMER;

GLASS;

EID: 33744799433     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2201457     Document Type: Article

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