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Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 6, 1998, Pages 2938-2941

Silicon nanopillars formed with gold colloidal particle masking

(3) Lewis, P A a Ahmed, H a Sato, T b,c

a UNIVERSITY OF CAMBRIDGE (United Kingdom)

b HITACHI CAMBRIDGE LABORATORY (United Kingdom)

c HITACHI LTD (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 11744322745 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.590322 Document Type: Article

Times cited : (64)

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