Fabrication and characterization of slanted nanopillars array

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 23, Issue 3, 2005, Pages 984-989

  Fu, Yongqi ^a   Bryan, Ngoi Kok Ann ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; COMMINUTION; DNA; FABRICATION; ION BEAMS; NANOSTRUCTURED MATERIALS; SILICON;

FOCUSED ION-BEAMS (FIB); MOLECULAR ADHESION; SLANTED NANOPILLARS ARRAYS;

ARRAYS;

EID: 31144431727     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1926291     Document Type: Article

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