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Volumn 48, Issue 14, 2009, Pages 2457-2459

Room-Temperature growth of silicon oxide nanofilms: New opportunities for plastic electronics

Author keywords

Atomic layer deposition; Langmuir Blodgett films; Nanostructures; Organic transistors; Silicon oxide

Indexed keywords

COMPONENT DIMENSIONS; FABRICATION METHOD; GATE DIELECTRIC LAYERS; LAYER-BY-LAYERS; LOW TEMPERATURES; NANO FILMS; NANO METER RANGE; NEW OPPORTUNITIES; ORGANIC MATERIALS; ORGANIC TRANSISTORS; PHASE PROCESSING; PLASTIC ELECTRONICS; PLASTIC TRANSISTORS; POLYMER PRECURSORS; PRECISE CONTROL; ROOM TEMPERATURE; ULTRATHIN SILICON OXIDE;

EID: 70349909881     PISSN: 14337851     EISSN: None     Source Type: Journal    
DOI: 10.1002/anie.200805329     Document Type: Article
Times cited : (12)

References (37)
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    • (2008) Angew. Chem. Int. Ed , vol.47 , pp. 4070-4098
  • 18
    • 70349971159 scopus 로고    scopus 로고
    • US Patent 4,058.430, 1977
    • T. Suntula, J. Antson, US Patent 4,058.430, 1977.
    • Suntula, T.1    Antson, J.2
  • 26
    • 26844451426 scopus 로고    scopus 로고
    • Angew. Chem. Int. Ed. 2005, 44, 6282-6304;
    • (2005) Angew. Chem. Int. Ed , vol.44 , pp. 6282-6304


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.