Stepwise growth of ultrathin SiOx films on Si(100) surfaces through sequential adsorption/oxidation cycles of alkylsiloxane monolayers

Langmuir

Volumn 12, Issue 20, 1996, Pages 4614-4617

  Brunner, H ^a   Valiant, T ^a   Mayer, U ^a   Hoffmann, H ^a  

^a VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001669585     PISSN: 07437463     EISSN: None     Source Type: Journal    
DOI: 10.1021/la960395t     Document Type: Article

References (27)

1. Bauer, G., Kuchar, F., Heinrich, H., Eds. Low-Dimensional Electronic Systems; Springer Series in Solid State Science; Springer: Berlin, 1992; Vol. 111.
2. Sneh, O.; Wise, M. L.; Ott, A. W.; Okada, L. A.; George, S.M. Surf. Sci. 1995, 334, 135.
3. Mirley, C. L.; Koberstein, J. T. Langmuir 1995, 11, 1049.
4. (a) Tada, H. Langmuir 1995, 11, 3281.
5. (b) Tada, H. Langmuir 1996, 12, 966.
6. Danner, J. B.; Vohs, J. M. Langmuir 1994, 10, 3116.
7. Suntola, T. Mater. Sci. Rep. 1989, 4, 261.
8. Hoffmann, H.; Mayer, U.; Krischanitz, A. Langmuir 1995, 11, 1304.
9. Tillman, N.; Ulman, A.; Penner, T. L. Langmuir 1989, 5, 101.
10. Wasserman, S. R.; Tao, Y. T.; Whitesides, G. M. Langmuir 1989, 5, 1074.
11. Pomerantz, M.; Segmüller, A.; Netzer, L.; Sagiv, J. Thin Solid Films 1985, 132, 153.
12. 3 (ref 10) and was ascribed to changes in the film structure and/or surface coverage with increasing film thickness.
13. Hoffmann, H.; Mayer, U.; Brunner, H.; Krischanitz, A. Vib. Spectrosc. 1995, 8, 151.
14. (a) McCrackin, F. L.; Passaglia, E.; Stromberg, R. R.; Steinberg, H. L. J. Res. Natl. Bur. Stand., Sect. A 1963, 67, 363.
15. (b) Azzam, R. M. A.; Bashara, N. M. Ellipsometry and Polarized Light; North-Holland: Amsterdam, 1977.
16. Parikh, A. N.; Allara, D. L.; Azouz, I. B.; Rondolez, F. J. Phys. Chem. 1994, 98, 7577 and references cited therein.
17. Vig, J. R. In Treatise on Clean Surface Technology; Mittal, K. L., Ed.; Plenum Press: New York, 1987; Vol 1.
18. Frantz, P.; Granick, S. Langmuir 1992, 8, 1176.
19. 4] tetrahedrons on the surface.
20. 4] tetrahedrons on the surface.
21. (a) Berreman, D. W. Phys. Rev. 1963, 130, 2193.
22. (b) Wong, J. S.; Yen, Y. Appl. Spectrosc. 1988, 42, 598.
23. (c) Yen, Y.; Wong, J. S. J. Phys. Chem, 1989, 93, 7208.
24. (d) Yamamoto, K; Ishida, H. Appl. Spectrosc. 1994, 48, 775.
25. (a) Brandriss, S.; Margel, S. Langmuir 1993, 9, 1232.
26. (b) Tripp, C. P.; Hair, M. L. Langmuir 1995, 11, 149.
27. (c) Tripp, C. P.; Hair, M. L. Langmuir 1995, 11, 1215.