PECVD silicon carbide as a chemically-resistant thin film packaging technology for microfabricated antennas

IEEE Wireless and Microwave Technology Conference, WAMICON 2006

Volumn , Issue , 2006, Pages

  Scardelletti, Maximilian C ^a   Varaljay, Nickolas C ^a   Oldham, Daniel R ^a   Zorman, Christian A ^b  

^a NASA GLENN RESEARCH CENTER   (United States)

^b CASE WESTERN RESERVE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA SUBSTRATES; CHAMBER PRESSURES; COPLANAR WAVEGUIDE (CPW) FEED; DUAL FREQUENCY; FOLDED SLOT; MICROFABRICATED ANTENNAS; MICROWAVE TECHNOLOGY; PACKAGING TECHNOLOGIES; PHYSICAL INTEGRITY; PLANAR ANTENNAS; PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION (PECVD); POWER LEVELING; RETURN LOSS (RL); RF PERFORMANCE; SIC FILMS; SILICON CARBIDE (SIC);

ANTENNA ACCESSORIES; ANTENNA ARRAYS; ANTENNAS; CHEMICAL REACTIONS; CHEMICAL RESISTANCE; FABRICATION; HEALTH; METALLIZING; MICROFABRICATION; MICROWAVE ANTENNAS; MICROWAVE DEVICES; MICROWAVES; NONMETALS; OPTICAL DESIGN; PLASMA DEPOSITION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RELIABILITY; SILICON; SILICON CARBIDE; SULFATE MINERALS; TECHNOLOGY; THICK FILMS; THIN FILM DEVICES; THIN FILMS; VAPOR DEPOSITION;

SLOT ANTENNAS;

EID: 48749122100     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/WAMICON.2006.351933     Document Type: Conference Paper

References (5)

1. Robertson, C. D., Matloubian, M., Case, M., Katehi, L. P. B., "A Micromachined Conformal Package for a K-band Low Noise HEMT Amplifier", IEEE International Microwave Theory and Techniques Symposium, Vol. 2., Page(s) 517-520, Denver, Colorado. June, 1997.
2. Kyutae Lim, Obatoyinbo, A., Davis, M., Lasker, J., Tummala, R., "Development of a Planar Antenna in Multi-Layer Packages for RF-System-on-a-Package Applications.", Electrical Performance of Electrical Packaging,, Page(s) 101-104, October, 2001.
3. Sang-Hyuk Wi; Yong-Bin Sun; In-Sang Song; Sung-Hoon Choa; Koh, I.-S.; Yong-Shik Lee; Jong-Gwan Yook;., Package-Level Integrated Antennas Based on LTCC Technology., IEEE Transactions on Antennas and Propagation, Vol. 54, No. 8, Page(s) 2190-2197. August, 2006.
4. Maximilian C.Scardelletti, Amjad A. Omar, and Nihad Dib, " Planar and Cylindrical CPW Fed Dual Frequecny Folded Slot Antennas." IEEE International Symposium on Antennas and Propagation, Albuquerque, NM, July 9-14, 2006.
5. Amjad A. Omar, Maximilian C. Scardelletti, Zuhair M. Hejazi, and Nihad Dib, "Design and Analysis of Self-Matched Dual-Frequency Coplanar Waveguide- Fed-Slot Antennas", IEEE Antennas and Propagation Transactions, Accepted and to be printed in January, 2007.