Electron transport coefficients in mixtures of CF4 and CF 2 radicals

Plasma Sources Science and Technology

Volumn 18, Issue 3, 2009, Pages

  Nikitović, Željka D ^a   Stojanović, Vladimir D ^a   Booth, Jean Paul ^b   Petrović, Zoran Lj ^a  

^a UNIVERSITY OF BELGRADE   (Serbia)

^b ECOLE POLYTECHNIQUE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVE SPECIES; BOLTZMANN'S EQUATIONS; CHEMICAL KINETICS; ELECTRON ATTACHMENT; ELECTRON KINETICS; ELECTRON TRANSPORT COEFFICIENT; GAS NUMBER DENSITY; MONTE CARLO SIMULATION; PROCESSING PLASMA; RATE OF PRODUCTIONS; SEMICONDUCTOR PRODUCTION; TRANSPORT COEFFICIENT;

COMPUTER SIMULATION LANGUAGES; ELECTRIC FIELDS; ELECTRON TRANSPORT PROPERTIES; FREE RADICAL REACTIONS; FREE RADICALS; MONTE CARLO METHODS; PLASMAS;

BOLTZMANN EQUATION;

EID: 68649100991     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/18/3/035008     Document Type: Article

References (35)

1. Makabe T and Petrović Z Lj 2006 Plasma Electronics (New York: Taylor and Francis)
2. Lieberman M A and Lichtenberg A J 2005 Principles of Plasma Discharges and Materials Processing 2nd edn (Hoboken, NJ: Wiley Interscience)
3. Hunter S R, Carter J G and Christophorou L G 1985 J. Appl. Phys. 58 3001-15
4. James D R, Christophorou L G and Mathis R A 1980 New unitary and multicomponent gaseous dielectrics Gaseous Dielectrics II ed L G Christophorou (New York: Pergamon) p 115
5. Kopp M K, Valentine K H, Christophorou L G and Carter J G 1982 Nucl. Instrum. Methods 201 395-401
6. Yamashita T et al 1992 Nucl. Instrum. Methods Phys. Res. A 317 213-20
7. Bzenić S, Manola S S and Petrović Z Lj 1995 Proc. 25th European Microwave Conf. (Swanley Nexus, Bologna, Italy) p 856
8. Booth J P 1999 Plasma Sources Sci. Technol. 8 249
9. Nakano T and Samukawa S 1999 J. Vac. Sci. Technol. A 17 686-91
10. Hioki K, Hirata K, Nakano N, Petrović Z Lj and Makabe T 2000 J. Vac. Sci. Technol. A 18 864-72
11. Booth J P, Abada H, Chabert P and Graves D B 2005 Plasma Sources Sci. Technol. 14 273-82
12. Curley G A, Marić D, Booth J P, Corr C S, Chabert P and Guillon J 2007 Plasma Sources Sci. Technol. 16 S87-S93
13. Rozum I, Limao-Vieira P, Eden S, Tennyson J and Mason N J 2006 J. Phys. Chem. Ref. Data 35 267-84
14. Booth J P, Cunge G, Chabert P and Sadeghi N 1999 J. Appl. Phys. 85 3097
15. Cunge G and Booth J P 1999 J. Appl. Phys. 85 3952
16. Bulcourt N, Booth J P, Hudson E A, Luque J, Mok D K W, Lee E P, Chau F-T and Dyke J M 2004 J. Chem. Phys. 120 9499
17. Kurihara M, Petrović Z Lj and Makabe T 2000 J. Phys. D: Appl. Phys. 33 2146-53
18. Donko Z 2006 personal communication
19. Morgan W L and Penetrante B M 1990 Comput. Phys. Commun. 58 127-52
20. Dujko S, Raspopović Z M and Petrović Z Lj 2005 J. Phys. D: Appl. Phys. 38 2952-66
21. Long W H Jr, Bailey W F and Garscadden A 1976 Phys. Rev. A 13 471
22. Vrhovac S B and Petrović Z Lj 1996 Phys. Rev. E 53 4012-25
23. Stoffels E, Stoffels W W and Kroesen G M W 2001 Plasma Sources Sci. Technol. 10 311-7
24. Ohmori T, Goto T and Makabe T 2004 J. Phys. D: Appl. Phys. 37 2223-31
25. Economou D J 2007 Appl. Surf. Sci. 253 6672-80
26. Morgan W L 1992 Plasma Chem. Plasma Process. 12 449
27. Gudmundson J T 2002 J. Phys. D: Appl. Phys. 35 328
28. Rauf S and Kushner M J 1999 IEEE Trans. Plasma Sci. 27 1329
29. Agarwal A and Kushner M J 2005 J. Vac. Sci. Technol. A 23 1440
30. Petrović Z Lj, Nikitović and Stojanović V 2008 J. Phys.: Conf. Ser. 10 012003
31. Nikitović, Stojanović V and Petrović Z Lj 2009 Acta Phys. Pol. A 115 765-7
32. Maddern T M, Hargreaves L R, Francis-Staite J R, Brunger M J, Buckman S J, Winstead C and McKoy V 2008 Phys. Rev. Lett. 100 063202
33. Maddern T M, Hargreaves L R, Buckman S J and Brunger M J 2007 J. Phys.: Conf. Ser. 86 012005
34. Graupner K and Field T A 2007 J. Phys.: Conf. Ser. 86 012002
35. Ohmori T, Goto T, Kitajima T and Makabe 2003 T Appl. Phys. Lett. 83 4637-9