Influence of air humidity on polymeric microresonators

Journal of Micromechanics and Microengineering

Volumn 19, Issue 6, 2009, Pages

  Schmid, S ^a   Kuhne S ^a   Hierold, C ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

AIR HUMIDITY; ANALYTICAL MODEL; ANTIPLASTICIZATION; EIGENFREQUENCY; HIGHLY SENSITIVE; MECHANICAL MODEL; MICRO BEAMS; MICRO MIRROR; MICRO RESONATORS; OUT-OF-PLANE MODES; POLYMER MATERIALS; POLYMERIC STRUCTURES; PRE-STRESS; RELATIVE FREQUENCIES; RELATIVE HUMIDITIES; RESONANT FREQUENCIES; RESONANT FREQUENCY CHANGE; ROOM TEMPERATURE; STRUCTURE TYPE; VOLUME EXPANSION; WATER ABSORPTION MODELS;

FLUID STRUCTURE INTERACTION; MOISTURE; NATURAL FREQUENCIES; POLYMERS; RESONATORS; WATER ABSORPTION;

ATMOSPHERIC HUMIDITY;

EID: 68249153832     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/6/065018     Document Type: Article

References (45)

1. Srikar V T and Spearing S M 2003 Materials selection in micromechanical design: an application of the Ashby approach J. Microelectromech. Syst. 12 3-10
2. Quake S R and Scherer A 2000 From micro- to nanofabrication with soft materials Science 290 1536-40
3. Gaspar J, Chu V and Conde J P 2005 Electrostatically actuated thin-film amorphous silicon microbridge resonators J. Appl. Phys. 97 094501
4. Nguyen N T, Ho S S and Low C L N 2004 A polymeric microgripper with integrated thermal actuators J. Micromech. Microeng. 14 969-74
5. Srikar V T and Spearing S M 2003 Materials selection for microfabricated electrostatic actuators Sensors Actuators A 102 279-85
6. Zhang G, Chu V and Conde J P 2007 Electrostatically actuated conducting polymer microbridges J. Appl. Phys. 101 064507
7. Zhang G, Chu V and Conde J P 2007 Electrostatically actuated bilayer polyimide-based microresonators J. Micromech. Microeng. 17 797-803
8. Schmid S, Wendlandt M, Junker D and Hierold C 2006 Nonconductive polymer microresonators actuated by the Kelvin polarization force Appl. Phys. Lett. 89 163506
9. Schmid S, Senn P and Hierold C 2008 Electrostatically actuated nonconductive polymer microresonators in gaseous and aqueous environment Sensors Actuators A 145-146 442-8
10. Bachmann D, Schoeberle B, Kuehne S, Leiner Y and Hierold C 2006 Fabrication and characterization of folded SU-8 suspensions for MEMS applications Sensors Actuators A 379-86
11. Bachmann D, Kühne S and Hierold C 2007 MEMS scanning mirror supported by soft polymeric springs and actuated by electrostatic charge separation IEEE 20th Int. Conf. on Micro Electro Mechanical Systems, 2007 pp 723-6
12. Lee C-Y, Lin C-H and Fu L-M 2006 MEMS/NEMS, Techniques in MEMS Devices for Micro Humidity Sensors and Their Applications (New York: Springer)
13. Rittersma Z M 2002 Recent achievements in miniaturised humidity sensors: "a review of transduction techniques Sensors Actuators A 96 196-210
14. Battiston F M, Ramseyer J-P, Lang H P, Baller M K, Gerber C, Gimzewski J K, Meyer E and Güntherodt H-J 2001 A chemical sensor based on a microfabricated cantilever array with simultaneous resonance-frequency and bending readout Sensors Actuators B 77 122-31
15. Kurzawski P, Hagleitner C and Hierlemann A 2006 Detection and discrimination capabilities of a multitransducer single-chip gas sensor system Anal. Chem. 78 6910-20
16. Pascal-Delannoy T, Sorli B and Boyer A 2000 Quartz crystal microbalance (QCM) used as humidity sensor Sensors Actuators A 84 285-91
17. Sakai Y, Sadaoka Y and Matsuguchi M 1996 Humidity sensors based on polymer thin films Sensors Actuators B 35 85-90
18. Li Y, Yanga M J, Camaionib N and Casalbore-Miceli G 2001 Humidity sensors based on polymer solid electrolytes: investigation on the capacitive and resistive devices construction Sensors Actuators B 77 625-31
19. Sager K, Gerlach G and Schroth A 1994 A humidity sensor of a new type Sensors Actuators B 18 85-8
20. Buchhold R, Nakladal A, Gerlach G, Sahre K, Eichhorn K-J and Müller M 1998 Reduction of mechanical stress in micromachined components caused by humidity-induced volume expansion of polymer layers Microsyst. Technol. 5 3-12 (Pubitemid 128531456)
21. Vieth W R 1991 Diffusion in and Through Polymers (Munich: Hanser)
22. Dlubek G, Buchhold R, Hübner Ch and Nakladal A 1999 Water in local free volume of polyimides: a positron lifetime study Macromolecules 32 2348-55
23. Diamant Y, Marom G and Broutman L J 1981 The effect of network structure on moisture absorption of epoxy resins J. Appl. Polym. Sci. 26 3015-25
24. Galipeau D W, Feger C, Vetelino J F and Lec R 1990 The study of polyimide films and adhesion using a surface acoustic wave sensor Proc. Ultrasonic Symp. pp 1087-90
25. Matsuguchi M, Shinmoto M, Sadaoka Y, Kuroiwa T and Sakai Y 1996 Effect of the degree of cross-linking on the characteristics of a PVCA capacitive-type humidity sensor Sensors Actuators B 34 349-55 (Pubitemid 126379886)
26. Barton J M 1979 Effect of absorbed water on the thermal relaxation of biaxially stretched crosslinked poly(methyl methacrylate) Polymer 20 1018-24
27. Dermitzaki E, Wunderle B, Bauer J, Walter H and Michel B 2008 Structure property correlation of epoxy resins under the influence of moisture; and comparison of diffusion coefficient with MD-simulation Proc. Int. Conf. on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems pp 1-8
28. Ardebili H, Wong E H and Pecht M 2003 Hygroscopic swelling and sorption characteristics of epoxy molding compounds used in electronic packaging IEEE Trans. on Compon. Packaging Technol. 26 206-14
29. Vanlandingham M R, Eduljee R F and Gillespie J W 1999 Moisture diffusion in epoxy systems J. Appl. Polym. Sci. 71 787-98
30. Feng R and Farris R J 2003 Influence of processing conditions on the thermal and mechanical properties of SU8 negative photoresist coatings J. Micromech. Microeng. 13 80-8
31. Lawrence S St, Willett J L and Carriere C J 2001 Effect of moisture on the tensile properties of poly(hydrxy ester ether) Polymer 42 5643-50
32. Ito S et al 2005 Effects of resin hydrophilicity on water sorption and changes in modulus of elasticity Biomaterials 26 6449-59
33. Cousins W J 1976 Elastic modulus of lignin as related to moisture content Wood Technol. 10 9-17
34. Ishiyama C and Higo Y 2002 Effects of humidity on Young's modulus in poly(methyl methacrylate) J. Polym. Sci. B 40 460-5
35. Zerda A S and Lesser A J 2004 Characteristics of antiplasticized thermosets: effects of network architecture and additive chemistry on mechanical fortification Polym. Eng. Sci. 44 2125-33
36. Rapp M, Böss B, Voigt A, Gemmeke H and Ache H J 1995 Development of an analytical microsystem for organic gas detection based on surface acoustic wave resonators Fresenius' J. Anal. Chem. 352 699-704
37. Dlubek G, Redmann F and Krause-Rehberg R 2002 Humidity-induced plasticization and antiplasticization of polyamide 6: a positron lifetime study of the local free volume J. Appl. Polym. Sci. 84 244-55
38. Schmid S and Hierold C 2008 Damping mechanisms of single-clamped and prestressed double-clamped resonant polymer microbeams J. Appl. Phys. 104 093516
39. Kühne S, Blattman R and Hierold C 2009 Low temperature fabrication process for high-aspect-ratio and multi-compliant MEMS Technical Digest of the MEMS Conference pp 673-676
40. Sayir Mahir B and Kaufmann Stephan 2005 Dynamik einfacher kontinuierlicher Strukturen Ingenieurmechanik 3: Dynamik (Leipzig: Teubner) chapter 34
41. Magnus K and Popp K 2005 Kontinuumsschwingungen Schwingungen 7th edn (Leipzig: Teubner) chapter 7
42. Bao M 2005 Analysis and Design Principles of MEMS Devices (Amsterdam: Elsevier)
43. Schöberle B 2008 Evaluation of viscoelastic materials for MEMS by creep compliance analysis PhD Thesis ETH Zurich
44. Lorenz H, Despont M, Fahrni N, LaBianca N, Renaud P and Vettiger P 1997 SU-8: a low-cost negative resist for MEMS J. Micromech. Microeng. 7 121-4
45. Feng R and Farris R J 2002 The characterization of thermal and elastic constants for an epoxy photoresist SU8 coating J. Mater. Sci. 37 4795-801