Electrostatically actuated bilayer polyimide-based microresonators

Journal of Micromechanics and Microengineering

Volumn 17, Issue 4, 2007, Pages 797-803

  Zhang, Guandong ^a   Chu, Virginia ^a   Conde, Joao Pedro ^a,b  

^a INESC   (Portugal)

^b INSTITUTO SUPERIOR TÉCNICO   (Portugal)

Author keywords

[No Author keywords available]

Indexed keywords

CONDUCTING POLYMERS; ELECTROSTATIC ACTUATORS; GLASS FIBERS; MULTILAYERS; POLYIMIDES; THERMAL EFFECTS;

ALL-POLYMER RESONATOR MICROBRIDGES; ELECTROSTATIC ACTUATION; GLASS SUBSTRATES; MICRORESONATORS; QUALITY FACTORS;

MEMS;

EID: 34249069526     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/4/017     Document Type: Conference Paper

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