Fabrication and characterization of folded SU-8 suspensions for MEMS applications

Sensors and Actuators, A: Physical

Volumn 130-131, Issue SPEC. ISS., 2006, Pages 379-386

  Bachmann, Daniel ^a   Schöberle, Bernd ^a   Kühne, Stéphane ^a   Leiner, Yves ^a   Hierold, Christofer ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

Fabrication technology; Materials characterization; Polymers; SU 8

Indexed keywords

CHIP SCALE PACKAGES; FABRICATION; MECHANICAL PROPERTIES; POLYMERS; PROCESS CONTROL; SENSORS;

MEMS FORCE SENSORS; PROCESS MONITORING; SCANNING MICROMIRRORS; WAFER-LEVEL FABRICATION;

MICROELECTROMECHANICAL DEVICES;

EID: 33745839263     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.12.020     Document Type: Article

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