Electrostatically actuated conducting polymer microbridges

Journal of Applied Physics

Volumn 101, Issue 6, 2007, Pages

  Zhang, G ^a   Chu, V ^a   Conde, J P ^a,b  

^a INESC   (Portugal)

^b INSTITUTO SUPERIOR TÉCNICO   (Portugal)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONDUCTIVITY; ELECTRIC FIELDS; ELECTRIC POTENTIAL; MICROMACHINING; NATURAL FREQUENCIES; RESIDUAL STRESSES;

BRIDGE DEFLECTION; MICROBRIDGES; POLYMER BRIDGES;

CONDUCTING POLYMERS;

EID: 34047172493     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2710436     Document Type: Article

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