MEMS scanning mirror supported by soft polymeric springs and actuated by electrostatic charge separation

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2007, Pages 723-726

  Bachmann, Daniel ^a   Kühne, Stéphane ^a   Hierold, Christofer ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONNECTORS; ELECTROSTATICS; MEMS; MIRRORS; PLASMA THEORY;

ACTUATION VOLTAGES; ELECTRICAL CONNECTION; ELECTROSTATIC CHARGES; LARGE SCAN ANGLE; MEMS SCANNING MIRROR; POLYMERIC SPRINGS; POLYMERIC SUSPENSIONS; SILICON MIRRORS;

POLYMERS;

EID: 44949236435     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/memsys.2007.4433088     Document Type: Conference Paper

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