Mass sensing with resonating ulltrathin double beams

Proceedings of IEEE Sensors

Volumn 2, Issue 2, 2003, Pages 825-829

  Ono, Takahito ^a   Wang, Dong F ^a,b   Esashi, Masayoshi ^a  

^a TOHOKU UNIVERSITY   (Japan)

^b JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION; CANTILEVER BEAMS; CMOS INTEGRATED CIRCUITS; ELECTROSTATICS; HEATING; LASER APPLICATIONS; MICROMACHINING; NATURAL FREQUENCIES; OSCILLATIONS; RESONANCE; SINGLE CRYSTALS; VACUUM;

LASER DOPPLER VIBROMETERS (LDV); MASS SENSORS;

SENSORS;

EID: 1542363450     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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