Temperature compensation of silicon resonant pressure sensor

Sensors and Actuators, A: Physical

Volumn 57, Issue 3, 1996, Pages 179-182

  Věříš, Jan ^a  

^a CZECH TECHNICAL UNIVERSITY IN PRAGUE   (Czech Republic)

Author keywords

Resonant pressure sensors; Silicon; Temperature compensation

Indexed keywords

CALCULATIONS; NATURAL FREQUENCIES; OSCILLATIONS; PRESSURE MEASUREMENT; RESONATORS;

RESONANT PRESSURE SENSORS; TEMPERATURE COMPENSATION;

SILICON SENSORS;

EID: 0030350411     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)80111-2     Document Type: Article

References (4)

1. R. Langdom, Resonant Sensors - a review, J. Phys. Electrotechnics: Sci. Instrum., 18 (1985) 103.
2. E. Stemme and G. Stemme, Capacitively excited and detected resonant pressure sensor with temperature compensation, Sensors and Actuators A, 32 (1992) 639-647.
3. J.C. Greenwood and D.W. Satchell, A miniature silicon resonant pressure sensor, IEE Proc., 135 (1988) 369-372.
4. J.C. Greenwood and T. Wray, High accuracy pressure measurement with a silicon resonant sensor, Sensors and Actuators A, 37-38 (1993) 82-85.