Length and thickness dependence of longitudinal flexural resonance frequency shifts of a piezoelectric microcantilever sensor due to Young's modulus change

Journal of Applied Physics

Volumn 104, Issue 7, 2008, Pages

  Shih, Wan Y ^a   Zhu, Qing ^b   Shih, Wei Heng ^b  

^a DREXEL UNIVERSITY   (United States)

^b Drexel University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AIR POLLUTION CONTROL EQUIPMENT; CHEMICAL SENSORS; COMPOSITE MICROMECHANICS; ELASTIC MODULI; ELASTICITY; FREQUENCY SHIFT KEYING; NATURAL FREQUENCIES; PIEZOELECTRICITY; SENSOR NETWORKS; SENSORS;

FLEXURAL RESONANCE FREQUENCIES; LONGITUDINAL; MASS CHANGES; MASS DETECTIONS; MICROCANTILEVER SENSORS; PIEZOELECTRIC; PIEZOELECTRIC LAYERS; RESONANCE FREQUENCY SHIFTS; THICKNESS DEPENDENCES; YOUNG'S MODULUS;

RESONANCE;

EID: 54049100370     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2990057     Document Type: Article

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