Improvement in crystallinity and optical properties of ZnO epitaxial layers by thermal annealed ZnO buffer layers with oxygen plasma

Journal of Crystal Growth

Volumn 311, Issue 14, 2009, Pages 3568-3572

  Kim, Min Su ^a   Kim, Tae Hoon ^a   Kim, Do Yeob ^a   Kim, Ghun Sik ^a   Choi, Hyun Young ^a   Cho, Min Young ^a   Jeon, Su Min ^a   Kim, Jong Su ^b   Kim, Jin Soo ^c   Lee, D Y ^d   Son, J S ^e   Lee, Joo In ^f   Kim, Jin Ha ^g   Kim, Eundo ^g   Hwang, Do Weon ^g   Leem, J Y ^a  

^a Inje University   (South Korea)

^b Yeungnam University   (South Korea)

^c Chonbuk National University   (South Korea)

^d Samsung Electro Mechanics   (South Korea)

^e Kyungwoon University   (South Korea)

^f Korea Research Institute of Standards and Science   (South Korea)

^g ALPHAPLUS Co Ltd   (South Korea)

Author keywords

A1. Atomic force microscopy; A1. X ray diffraction; A3. Molecular beam epitaxy; B1. Zinc oxide

Indexed keywords

A1. ATOMIC FORCE MICROSCOPY; A1. X-RAY DIFFRACTION; A3. MOLECULAR BEAM EPITAXY; AFM; B1. ZINC OXIDE; CRYSTALLINITY; DEEP LEVEL EMISSION; HIGH-RESOLUTION X-RAY DIFFRACTION; INTENSITY RATIO; LOW TEMPERATURES; NEAR BAND EDGE EMISSIONS; OXYGEN PLASMAS; P-TYPE SI; PL EMISSION; PL INTENSITY; PLASMA-ASSISTED MOLECULAR BEAM EPITAXY; RADIO FREQUENCY POWER; RF-POWER; ROCKING CURVES; ROOM TEMPERATURE; SI SUBSTRATES; STRUCTURAL AND OPTICAL PROPERTIES; THERMAL-ANNEALING; TREATMENT PROCESS; XRD; ZNO; ZNO BUFFER LAYER;

ATOMIC FORCE MICROSCOPY; ATOMS; BUFFER LAYERS; CRYSTAL ATOMIC STRUCTURE; CRYSTAL GROWTH; DIFFRACTION; EPILAYERS; MOLECULAR BEAM EPITAXY; MOLECULAR BEAMS; MOLECULAR DYNAMICS; OPTICAL MICROSCOPY; OPTICAL PROPERTIES; OXYGEN; PHOTOLUMINESCENCE; PLASMAS; SEMICONDUCTING ZINC COMPOUNDS; SEMICONDUCTOR QUANTUM DOTS; SEMICONDUCTOR QUANTUM WELLS; SEMICONDUCTOR QUANTUM WIRES; SURFACE ROUGHNESS; X RAY DIFFRACTION; X RAY DIFFRACTION ANALYSIS; ZINC; ZINC OXIDE;

EPITAXIAL LAYERS;

EID: 67650045877     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2009.05.010     Document Type: Article

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