Performance improvement of ZnO film by room-temperature oxygen plasma pretreatment

Transactions of Nonferrous Metals Society of China (English Edition)

Volumn 16, Issue SUPPL., 2006, Pages

  Zhao, Ping ^a   Xia, Yi Ben ^a   Wang, Lin Jun ^a   Liu, Jian Min ^a   Xu, Run ^a   Peng, Hong Yan ^b   Shi, Wei Min ^a  

^a SHANGHAI UNIVERSITY   (China)

^b MUDANJIANG NORMAL UNIVERSITY   (China)

Author keywords

C axis orientation; Nanocrystalline diamond film; Oxygen plasma; SAW device; ZnO film

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ATOMIC FORCE MICROSCOPY; DIAMOND FILMS; ELECTRIC PROPERTIES; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; SURFACE ROUGHNESS; X RAY DIFFRACTION ANALYSIS;

OXYGEN PLASMA TREATMENT; SURFACE ACOUSTIC WAVE (SAW) DEVICE; ZNO FILM;

ZINC OXIDE;

EID: 33746851187     PISSN: 10036326     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1003-6326(06)60198-2     Document Type: Article

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