Properties of ZnO thin films grown on Si substrates by MOCVD and ZnO/Si heterojunctions

Semiconductor Science and Technology

Volumn 20, Issue 11, 2005, Pages 1132-1135

  Zhang, Yuantao ^a   Du, Guotong ^a   Zhang, Baolin ^a   Cui, Yongguo ^a   Zhu, Huichao ^a   Chang, Yuchun ^a  

^a JILIN UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC POTENTIAL; HETEROJUNCTIONS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; OPTICAL PROPERTIES; PHOTOLUMINESCENCE; SILICON; TEMPERATURE DISTRIBUTION; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

DIETHYLZINC (DEZN); OPTICAL QUALITY; ZNO FILMS;

ZINC OXIDE;

EID: 27144469303     PISSN: 02681242     EISSN: None     Source Type: Journal    
DOI: 10.1088/0268-1242/20/11/006     Document Type: Article

References (19)

1. Rau U and Schmidt M 2001 Thin Solid Films 387 141
2. Liu Y, Gorla C R and Liang S et al 2000 J. Electron. Mater. 29 60
3. Soki T, Hatanaka Y and Look D C 2000 Appl. Phys. Lett. 76 3257
4. Iwata K, Fons P, Yamada A, Matsubara K and Niki S 2000 J. Cryst. Growth 209 526
5. Fons P, Iwata K, Niki S, Yamada A, Matsubara K and Watanabe M 2000 J. Cryst. Growth 209 532
6. Bagnall D, Chen Y, Zhu Z, Yao T, Koyama S, Shen M and Golo T 1998 Appl. Phys. Lett. 73 1038
7. Chichibu S F, Yoshida T, Onuma T and Nakanishi H 2002 J. Appl. Phys. 91 874
8. Myong S Y, Baik S J, Lee C H, Cho W Y and Lim K S 1997 Japan. J. Appl. Phys. 36 L1078
9. Kashiwaba Y, Katahira F, Haga K, Sekiguchi T and Watanabe H 2000 J. Cryst. Growth 221 431
10. Ogata K, Kawanishi T, Maejima K, Sakurai K, Fujita Sz and Fujita Sg 2001 Japan. J. Appl. Phys. 240 L657
11. Ogata K, Kawanishi T, Maejima K, Sakurai K, Fujita Sz and Fujita Sg 2002 J. Cryst. Growth 237-9 553
12. Lee J Y et al 2002 Thin Solid Films 403-4 553
13. Jeong I S, Kim J H and Im S 2003 Appl. Phys. Lett. 83 2946
14. Wang X Q et al 2002 J. Phys. D: Appl. Phys. 35 L74
15. Lee J Y et al 2002 Thin Solid Films 420-1 112
16. Park W I and Yi G-C 2001 J. Electron. Mater. 30 L32
17. Kumano H, Ashrafi A A and Heta A et al 2000 J. Crystal Growth 214-5 280
18. Bethke S, Pan H and Wessels B W 1988 Appl. Phys. Lett. 52 138
19. Sze S M 1981 Physics of Semiconductor Devices 2nd edn (New York: Wiley) pp 89-92