Development of measurement technique for carbon atoms employing vacuum ultraviolet absorption spectroscopy with a microdischarge hollow-cathode lamp and its application to diagnostics of nanographene sheet material formation plasmas

Journal of Applied Physics

Volumn 105, Issue 11, 2009, Pages

  Takeuchi, Wakana ^a   Sasaki, Hajime ^a   Kato, Satoru ^b   Takashima, Seigo ^a   Hiramatsu, Mineo ^b   Hori, Masaru ^a,c  

^a NAGOYA UNIVERSITY   (Japan)

^b MEIJO UNIVERSITY   (Japan)

^c JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOM DENSITY; C ATOMS; CARBON ATOMS; CARBON NANOWALLS; DENSITY RATIO; DOPPLER WIDTH; EMISSION LINES; H-ATOM DENSITY; HOLLOW CATHODE LAMP; LORENTZ WIDTH; MEASUREMENT TECHNIQUES; MICRODISCHARGE; OPERATING CONDITION; PROCESSING PLASMA; RESONANCE LINE; SHEET MATERIAL; SPACE BETWEEN; VACUUM ULTRAVIOLET ABSORPTION SPECTROSCOPIES; VOIGT PROFILE;

ABSORPTION; ATOMIC SPECTROSCOPY; ATOMS; ELECTRON SOURCES; EMISSION SPECTROSCOPY; LIGHT; LIGHT SOURCES; PLASMA SOURCES; SHEET METAL; VACUUM;

ABSORPTION SPECTROSCOPY;

EID: 67649519950     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3091279     Document Type: Article

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