Development of vacuum ultraviolet absorption spectroscopy technique employing nitrogen molecule microdischarge hollow cathode lamp for absolute density measurements of nitrogen atoms in process plasmas

Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

Volumn 19, Issue 2, 2001, Pages 599-602

  Takashima, Seigou ^a   Arai, Shigeo ^a   Hori, Masaru ^a   Goto, Toshio ^a   Kono, Akihiro ^a   Ito, Masafumi ^b   Yoneda, Katsumi ^c  

^a NAGOYA UNIVERSITY   (Japan)

^b WAKAYAMA UNIVERSITY   (Japan)

^c Nippon Laser and Electronics Lab   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION SPECTROSCOPY; CATHODES; MOLECULAR DYNAMICS; MOLECULAR STRUCTURE; NITROGEN; VACUUM APPLICATIONS;

MICRODISCHARGE HOLLOW CATHODE LAMPS; VACUUM ULTRAVIOLET ABSORPTION SPECTROSCOPY (VUVAS) METHOD;

PLASMAS;

EID: 0035271895     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1340655     Document Type: Article

References (13)