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Volumn 479, Issue 1-2, 2009, Pages 348-351
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Nanoindentation on a-plane ZnO thin films
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Author keywords
AFM; Hardness; Nanoindentation; XRD; ZnO
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Indexed keywords
A PLANES;
AFM;
ATOMIC-FORCE MICROSCOPIES;
DEPOSITION TEMPERATURES;
EXPERIMENTAL DATUM;
GRAIN SIZES;
HALL-PETCH;
HALL-PETCH EQUATIONS;
LATTICE FRICTIONS;
LOAD-DISPLACEMENT CURVES;
NANO-INDENTATION TECHNIQUES;
PLANE SAPPHIRES;
RADIO-FREQUENCY SPUTTERING;
STRUCTURAL AND MECHANICAL PROPERTIES;
X-RAY DIFFRACTIONS;
XRD;
XRD ANALYSIS;
YOUNG'S MODULUS;
ZNO;
ZNO THIN FILMS;
ATOMIC FORCE MICROSCOPY;
CORUNDUM;
GRAIN SIZE AND SHAPE;
HARDNESS;
MECHANICAL PROPERTIES;
METALLIC FILMS;
NANOINDENTATION;
OPTICAL FILMS;
SURFACE ROUGHNESS;
THIN FILMS;
X RAY DIFFRACTION;
X RAY DIFFRACTION ANALYSIS;
ZINC OXIDE;
SEMICONDUCTING ZINC COMPOUNDS;
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EID: 67349189441
PISSN: 09258388
EISSN: None
Source Type: Journal
DOI: 10.1016/j.jallcom.2008.12.073 Document Type: Article |
Times cited : (24)
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References (30)
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