Cross-sectional transmission electron microscopy observations of structural damage in Al0.16Ga0.84N thin film under contact loading

Journal of Applied Physics

Volumn 103, Issue 3, 2008, Pages

  Jian, Sheng Rui ^a   Juang, Jenh Yih ^b   Lai, Yi Shao ^c  

^a I SHOU UNIVERSITY   (Taiwan)

^b NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^c ADVANCED SEMICONDUCTOR ENGINEERING INC   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DEFORMATION; ELASTIC MODULI; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY;

BERKOVICH NANOINDENTER; NANOMECHANICAL RESPONSE; STRUCTURAL DAMAGES;

ALUMINUM ALLOYS;

EID: 39349101219     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2836939     Document Type: Article

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