Effect of annealing temperature on surface morphology and mechanical properties of sputter-deposited Ti-Ni thin films

Journal of Alloys and Compounds

Volumn 427, Issue 1-2, 2007, Pages 238-243

  Zhang, Lei ^a   Xie, Chaoying ^a   Wu, Jiansheng ^a  

^a Department of Materials Science   (China)

Author keywords

Crystallization kinetics; Mechanical properties; Surface roughness; TiNi thin films

Indexed keywords

ANNEALING; CRYSTAL STRUCTURE; CRYSTALLIZATION; DIFFERENTIAL SCANNING CALORIMETRY; MAGNETRON SPUTTERING; MORPHOLOGY; SPUTTER DEPOSITION; SURFACE ROUGHNESS; TITANIUM ALLOYS;

CRYSTALLIZATION DEGREES; CRYSTALLIZATION KINETICS; NANOINDENTION;

THIN FILMS;

EID: 35548971325     PISSN: 09258388     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jallcom.2006.02.067     Document Type: Article

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