Ion beam sputtering induced nanostructuring of polycrystalline metalfilms

Journal of Physics Condensed Matter

Volumn 21, Issue 22, 2009, Pages

  Ghose, Debabrata ^a  

^a SAHA INSTITUTE OF NUCLEAR PHYSICS   (India)

Author keywords

[No Author keywords available]

Indexed keywords

AS-DEPOSITED FILMS; DEPOSITED METAL; GRAZING ANGLES; INSULATOR SUBSTRATES; ION-BEAM SPUTTERING; METAL-FILMS; NANO-SCALE PATTERNS; NANO-STRUCTURING; NANORIPPLES; POLYCRYSTALLINE; POLYCRYSTALLINE METALS; RANDOM TARGETS; RMS ROUGHNESS; SCALE NANOSTRUCTURES; SMOOTHING PROCESS; STRUCTURAL ANISOTROPY;

CURVE FITTING; ELECTRIC WIRE; ION BEAMS; IONS; METALLIC FILMS; PHYSICAL VAPOR DEPOSITION; SPUTTERING;

ION BOMBARDMENT;

EID: 66249137474     PISSN: 09538984     EISSN: 1361648X     Source Type: Journal    
DOI: 10.1088/0953-8984/21/22/224001     Document Type: Article

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