Morphological instability of Cu nanolines induced by Ga+ -ion bombardment: In situ scanning electron microscopy and theoretical model

Journal of Applied Physics

Volumn 103, Issue 7, 2008, Pages

  Wei, Qiangmin ^a   Li, Weixing ^a   Sun, Kai ^a   Lian, Jie ^b   Wang, Lumin ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

^b RENSSELAER POLYTECHNIC INSTITUTE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ION BOMBARDMENT; MATHEMATICAL MODELS; MORPHOLOGY; SCANNING ELECTRON MICROSCOPY;

IN SITU SCANNING ELECTRON MICROSCOPY; MORPHOLOGICAL INSTABILITY;

COPPER;

EID: 42149175495     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2903881     Document Type: Article

References (55)

1. A.-D. Brown, J. Erlebacher, W. L. Chan, and E. Chason, Phys. Rev. Lett. 95, 056101 (2005).
2. B. Ziberi, F. Frost, Th. Höche, and B. Rauschenbach, Phys. Rev. B 72, 235310 (2005).
3. Q. M. Wei, J. Lian, W. Lu, and L. M. Wang, Phys. Rev. Lett. 1, 076103 (2008).
4. S. Facsko, Appl. Phys. Lett. 80, 130 (2002).
5. M. Castro, R. Cuerno, L. Vázquez, and R. Gago, Phys. Rev. Lett. 94, 016102 (2005).
6. G. Carter and V. Vishnyakov, Phys. Rev. B 54, 17647 (1996).
7. R. Gago, Phys. Rev. B 73, 155414 (2006).
8. P. F. A. Alkemade, Phys. Rev. Lett. 96, 107602 (2006).
9. R. Bradly and J. Harper, J. Vac. Sci. Technol. A 6, 2390 (1988).
10. R. Cuerno and A.-L. Barabási, Phys. Rev. Lett. 74, 4746 (1995).
11. U. Valbusa, C. Boragno, and F. B. de Mongeot, J. Phys.: Condens. Matter 14, 8153 (2002).
12. J. Lian, Nano Lett. 6, 1047 (2006).
13. K. Zhao, R. S. Averback, and D. G. Cahill, Appl. Phys. Lett. 89, 053103 (2006).
14. L. Rayleigh, Proc. London Math. Soc. 10, 4 (1878).
15. F. A. Nichols and W. W. Mullins, Trans. Metall. Soc. AIME 233, 1840 (1965).
16. P. Sigmund, Phys. Rev. 184, 383 (1969).
17. P. Sigmund, J. Mater. Sci. 8, 1545 (1973).
18. C. Redon, F. Brochard-Wyart, and F. Rondelez, Phys. Rev. Lett. 66, 715 (1991).
19. E. Chason and W. L. Chan, Nucl. Instrum. Methods Phys. Res. B 242, 232 (2006).
20. E. Chason, W. L. Chan, and M. S. Bharathi, Phys. Rev. B 74, 224103 (2006).
21. W. L. Chan and E. Chason, Phys. Rev. B 72, 165418 (2005).
22. W. L. Chan, N. Pavenayotin, and E. Chason, Phys. Rev. B 69, 245413 (2004).
23. W. L. Chan and E. Chason, J. Appl. Phys. 101, 121301 (2007).
24. M. Makeev, R. Cuerno, and A.-L. Barabási, Nucl. Instrum. Methods Phys. Res. B 197, 185 (2002).
25. R. L. Schoebel, J. Appl. Phys. 40, 614 (1969).
26. G. Ehrlich and H. Hudda, J. Chem. Phys. 44, 1039 (1966).
27. S. Rusponi, G. Costantini, C. Boragno, and U. Valbusa, Phys. Rev. Lett. 81, 2735 (1998a).
28. S. Rusponi, G. Costantini, C. Boragno, and U. Valbusa, Phys. Rev. Lett. 81, 4184 (1998b).
29. R. M. V. Murty, T. Curcic, A. Judy, B. H. CooperRusponi, G. Costantini, C. Boragno, and U. Valbusa, Phys. Rev. Lett. 80, 4713 (1998).
30. J. Villain, J. Phys. I 1, 19 (1991).
31. S. Rusponi, C. Boragno, and U. Valbusa, Phys. Rev. Lett. 78, 2795 (1997).
32. T. Michely and G. Comsa, Nucl. Instrum. Methods Phys. Res. B 82, 207 (1993).
33. M. Ritter, M. Stindtmann, M. Farle, K. Baberschke, Surf. Sci. 348, 246 (1997).
34. H. J. Ernst, Surf. Sci. 383, L755 (1997).
35. C. Herring, J. Appl. Phys. 74, 301 (1950).
36. W. W. Mullins, J. Appl. Phys. 28, 333 (1957).
37. M. A. Makeev and A.-L. Barabásia, Appl. Phys. Lett. 71, 2800 (1997).
38. M. A. Makeev, R. Cuerno, and A.-L. Barabási, Appl. Phys. Lett. 71, 2800 (1997).
39. J. Erlebacher, Phys. Rev. Lett. 82, 2330 (1999).
40. J. F. Ziegler, J. P. Biersack, and U. Litttmark, The Stopping and Range of Ions in Solids (Pergamon, New York, 1985).
41. K. B. Winterbon, P. Sigmund, and J. B. Sanders, Mat. Fys. Medd. K. Dan. Vidensk. Selsk. 37, 1 (1970).
42. W. R. Tyson and W. A. Miller, Surf. Sci. 62, 267 (1977).
43. U. Kürpick, A. Kara, and T. S. Rahman, Phys. Rev. Lett. 78, 1086 (1997).
44. M. E. T. Molares, A. G. Balogh, T. W. Cornelius, R. Neumann, and C. Trautmann, Appl. Phys. Lett. 85, 5337 (2004).
45. T. M. Mayer, E. Chason, and A. J. Howard, J. Appl. Phys. 76, 1633 (1994).
46. S. M. Murphy, Europhys. Lett. 3, 1267 (1987).
47. R. Bullough, B. L. Eyre, and K. Krishan, J. Nucl. Mater. 346, 81 (1975).
48. N. M. Ghoniem and G. L. Kulcinski, Radiat. Eff. 39, 47 (1978).
49. H. H. Anderson, in Ion Implantation and Beam Processing, edited by, J. S. Williams, and, J. M. Poate, (Academic, New York, 1984).
50. C. A. Volkert and A. M. Minor, MRS Bull. 32, 389 (2007).
51. H. S. Carlslaw and J. C. Jaeger, Conduction of Heat in Solids (Oxford University Press, Oxford, UK, 1959).
52. S. Park, B. Kahng, H. Jeong, and A.-L. Barabási, Phys. Rev. Lett. 83, 3486 (1999).
53. E. Chason, T. M. Mayer, B. K. Kellerman, D. T. Mcllroy, and A. J. Howard, Phys. Rev. Lett. 72, 3040 (1994).
54. C. C. Umbach, R. L. Headrick, and K. C. Chang, Phys. Rev. Lett. 87, 246104 (2001).
55. S. G. Mayr and R. S. Averback, Phys. Rev. Lett. 87, 196106 (2001).