Nanopatterning by multiple-ion-beam sputtering

Journal of Physics Condensed Matter

Volumn 21, Issue 22, 2009, Pages

  Joe, M ^a   Kim, J H ^b   Choi, C ^a   Kahng, B ^a   Kim, J S ^b  

^a Seoul National University   (South Korea)

^b Sookmyung Women's University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

GRAZING INCIDENCE; INDIVIDUAL ION; ION-BEAM SPUTTERING; MICROSCOPIC MECHANISMS; NANO PATTERN; NANOBEAD; NANODOT; NANOHOLE; NANOPATTERNING; NORMAL INCIDENCE; PATTERN FORMATION; SYSTEMATIC STUDY;

IONS; NANOSTRUCTURED MATERIALS;

ION BEAMS;

EID: 66249115664     PISSN: 09538984     EISSN: 1361648X     Source Type: Journal    
DOI: 10.1088/0953-8984/21/22/224011     Document Type: Article

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