Surface ripple amplification and attenuation by sputtering with diametrically opposed ion fluxes

Vacuum

Volumn 79, Issue 1-2, 2005, Pages 106-109

  Carter, G ^a  

^a UNIVERSITY OF SALFORD   (United Kingdom)

Author keywords

Depth profiling; Ion bombardment; Sputtering; Surface morphology; Surface ripples

Indexed keywords

AMPLIFICATION; ATTENUATION; DIFFUSION; FOURIER TRANSFORMS; ION BOMBARDMENT; IONS; MORPHOLOGY; SPUTTERING; VISCOUS FLOW;

DEPTH PROFILING; SURFACE HEIGHTS; SURFACE RIPPLES; WAVE VECTORS;

SURFACE PHENOMENA;

EID: 20344361983     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2005.01.011     Document Type: Article

References (25)

1. M. Navez, C. Sella, and D. Chaperot Comptes Rendus 254 1962 240
2. R.S. Nelson, and D.J. Mazey Ion Surface Interactions, Sputtering and Related Phenomena 1973 Gordon and Breach London p. 199
3. G. Carter, M.J. Nobes, F. Paton, J.S. Williams, and J.L. Whitton Radiat Eff 65 1977 33
4. C.C. Umbach, R.L. Headrick, and Chui Chang Kee Phys Rev Lett 87 2001 246104
5. S. Fackso, H. Kurz, and T. Dekorsky Phys Rev B63 2001 165329
6. G. Carter J Phys D 34 2001 R1 R22
7. U. Valbusa, C. Boragno, and F. B de Mongeot J Phys: Condens Matter 14 2002 8153
8. Makeev M, Cuerno R, Barabasi A-L. arXiv:cond-mat/0007354 v1 July 2000.
9. R.S. Bradley, and J.M. Harper J Vac Sci Technol A6 1988 2390
10. P. Sigmund J Mater Sci 8 1973 1545
11. G. Carter, M.J. Nobes, and R.P. Webb J Mater Sci 16 1981 2091
12. G. Carter J Mater Sci 11 1976 1091
13. M. Makeev, and A-L. Barabasi Appl Phys Lett 71 1997 2800
14. R. Cuerno, and A-L. Barabasi Phys Rev Lett 74 1995 1995
15. D.J. Barber, F.C. Frank, M. Moss, J.W. Steeds, and I.S.T. Tsong J Mater Sci 8 1973 1030
16. R. Smith, T.P. Valkering, and J.M. Walls Philos Mag A44 1981 879
17. G. Carter, M.J. Nobes, and S.A. Cruz J Mater Sci Lett 3 1984 523
18. S. Park, B. Kahng, H. Jeong, and A-L. Barabasi Phys Rev Lett 85 1999 3486
19. B. Kahng, H. Jeong, and A.-L. Barabasi Appl Phys Lett 78 2001 3559
20. G. Carter, V. Vishnyakov, Y.V. Martynenko, and M.J. Nobes J Appl Phys 78 1995 3559
21. G. Ehrlich, and F.G. Hudda J Chem Phys 44 1966 1039
22. R.L. Schwoebel, and E.J. Shipsey J Appl Phys 40 1968 614
23. R.M. Bradley, and H. Cirlin E- Appl Phys Lett 68 1996 3722
24. G. Carter Vacuum 77 2004 97 100
25. S. Habernicht, K.P. Lieb, J. Koch, and A.D. Wieck Phys Rev B65 2002 115327