Nanopatterning by dual-ion-beam sputtering

Applied Physics Letters

Volumn 91, Issue 23, 2007, Pages

  Joe, M ^a   Choi, C ^a   Kahng, B ^a   Kim, J S ^b  

^a Seoul National University   (South Korea)

^b Sookmyung Women's University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EROSION; SEMICONDUCTOR QUANTUM DOTS; SPUTTERING; TWO DIMENSIONAL;

DUAL-ION-BEAM SPUTTERING (DIBS); KURAMOTO-SIVASHINSKY (KS); NANODOTS;

ION BEAMS;

EID: 36849037804     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2816236     Document Type: Article

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