Proposals for producing novel periodic structures by ion bombardment sputtering

Vacuum

Volumn 77, Issue 1, 2004, Pages 97-100

  Carter, G ^a  

^a UNIVERSITY OF SALFORD   (United Kingdom)

Author keywords

Circular ripple patterns; Multiple ion fluxes; Rotating targets; Sputtering; Superimposed ripple patterns

Indexed keywords

AMORPHOUS MATERIALS; ARRAYS; ELECTRIC INSULATORS; IRRADIATION; SEMICONDUCTOR MATERIALS; SPUTTERING; SURFACE STRUCTURE;

CIRCULAR RIPPLE PATTERNS; MULTIPLE ION FLUXES; ROTATING TARGETS; SUPERIMPOSED RIPPLE PATTERNS;

ION BOMBARDMENT;

EID: 9544235184     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2004.07.082     Document Type: Article

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