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Thin Solid Films

Volumn 517, Issue 17, 2009, Pages 5231-5236

Microstructure, corrosion and tribological behaviors of TiAlSiN coatings deposited by cathodic arc plasma deposition

(3) Chang, Chi Lung a Lee, Jyh Wei b Tseng, Ming Don a

a MINGDAO UNIVERSITY (Taiwan)

b TUNG NAN INSTITUTE OF TECHNOLOGY (Taiwan)

Author keywords

Cathodic arc plasma deposition; Corrosion; TiAlSiN coating; Tribology; Wear

Indexed keywords

ANODIC POLARIZATION CURVES; CARBIDE SUBSTRATES; CATHODIC ARC DEPOSITION; CATHODIC ARC PLASMA DEPOSITION; CORROSION BEHAVIOR; MECHANICAL AND TRIBOLOGICAL PROPERTIES; NACL SOLUTION; SEM; TIALSIN COATING; TIALSIN COATINGS; TIN COATING; TRIBOLOGICAL BEHAVIORS; TRIBOMETER; WEAR; XPS ANALYSIS; XRD , TEM;

CAVITY RESONATORS; CHEMICAL VAPOR DEPOSITION; CORROSION RESISTANCE; ELECTRIC ARCS; MICROSTRUCTURE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMAS; SODIUM CHLORIDE; TITANIUM COMPOUNDS; TITANIUM NITRIDE; TRIBOLOGY; TUNGSTEN; TUNGSTEN CARBIDE; VACUUM DEPOSITED COATINGS;

PLASMA DEPOSITION;

EID: 65649140536 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2009.03.082 Document Type: Article

Times cited : (86)

References (39)

1
- 0022682994
- Makabe R., Nakajima S., Tabata O., and Aoki M. Thin Solid Films 137 (1986) L49
- (1986) Thin Solid Films , vol.137
- Makabe, R.¹ Nakajima, S.² Tabata, O.³ Aoki, M.⁴

2
- 25544459890
- Munz W.D. J. Vac. Sci. Technol. A 4 6 (1986) 2717
- (1986) J. Vac. Sci. Technol. A , vol.4 , Issue.6 , pp. 2717
- Munz, W.D.¹

3
- 0022451398
- Knoteck O., Bohmer M., and Leyendecker T. J. Vac. Sci. Technol. A 4 6 (1986) 2695
- (1986) J. Vac. Sci. Technol. A , vol.4 , Issue.6 , pp. 2695
- Knoteck, O.¹ Bohmer, M.² Leyendecker, T.³

4
- 0002173308
- Hultman L. Vacuum 57 (2000) 1
- (2000) Vacuum , vol.57 , pp. 1
- Hultman, L.¹

5
- 0025623906
- Roos J.R., Celis J.-P., and Vancoille E. Thin Solid Films 193/194 (1990) 547
- (1990) Thin Solid Films , vol.193-194 , pp. 547
- Roos, J.R.¹ Celis, J.-P.² Vancoille, E.³

6
- 0028005563
- Arrando F., Polo M.C., Molera P., and Esteve J. Surf. Coat. Technol. 68/69 (1994) 536
- (1994) Surf. Coat. Technol. , vol.68-69 , pp. 536
- Arrando, F.¹ Polo, M.C.² Molera, P.³ Esteve, J.⁴

7
- 2142816873
- de Wit E., Froyen L., and Celis J.-P. Wear 221 (1998) 128
- (1998) Wear , vol.221 , pp. 128
- de Wit, E.¹ Froyen, L.² Celis, J.-P.³

8
- 0026928525
- Li S., Shi Y., and Peng H. Plasma Chem. Plasma Process. 12 3 (1992) 287
- (1992) Plasma Chem. Plasma Process. , vol.12 , Issue.3 , pp. 287
- Li, S.¹ Shi, Y.² Peng, H.³

9
- 36449001310
- Veprek S., Reiprich S., and Shizhi L. Appl. Phys. Lett. 66 20 (1995) 2640
- (1995) Appl. Phys. Lett. , vol.66 , Issue.20 , pp. 2640
- Veprek, S.¹ Reiprich, S.² Shizhi, L.³

10
- 0040628653
- Veprek S. Pure Appl. Chem. 68 5 (1996) 1023
- (1996) Pure Appl. Chem. , vol.68 , Issue.5 , pp. 1023
- Veprek, S.¹

11
- 0029407730
- Veprek S., and Reiprich S. Thin Solid Films 268 (1995) 64
- (1995) Thin Solid Films , vol.268 , pp. 64
- Veprek, S.¹ Reiprich, S.²

12
- 0030130349
- He J.L., Chen C.K., and Hon M.H. Mater. Chem. Phys. 44 (1996) 9
- (1996) Mater. Chem. Phys. , vol.44 , pp. 9
- He, J.L.¹ Chen, C.K.² Hon, M.H.³

13
- 34250225298
- Hirai T., and Hayashi S. J. Mater. Sci. 17 (1982) 1320
- (1982) J. Mater. Sci. , vol.17 , pp. 1320
- Hirai, T.¹ Hayashi, S.²

14
- 0033504658
- Vaz F., Rebouta L., Almeida B., Goudeau P., Pacaud J., Rivière J.P., and Bessa e Sousa J. Surf. Coat. Technol. 120-121 (1999) 166
- (1999) Surf. Coat. Technol. , vol.120-121 , pp. 166
- Vaz, F.¹ Rebouta, L.² Almeida, B.³ Goudeau, P.⁴ Pacaud, J.⁵ Rivière, J.P.⁶ Bessa e Sousa, J.⁷

15
- 0036496671
- Ribeiro E., Malczyk A., Carvalho S., Rebouta L., Fernandes J.V., Alves E., and Miranda A.S. Surf. Coat. Technol. 151-152 (2002) 515
- (2002) Surf. Coat. Technol. , vol.151-152 , pp. 515
- Ribeiro, E.¹ Malczyk, A.² Carvalho, S.³ Rebouta, L.⁴ Fernandes, J.V.⁵ Alves, E.⁶ Miranda, A.S.⁷

16
- 10444238687
- Dobrzanski L.A., Pakula D., and Hajduczek E. J. Mater. Process. Technol. 157-158 (2004) 331
- (2004) J. Mater. Process. Technol. , vol.157-158 , pp. 331
- Dobrzanski, L.A.¹ Pakula, D.² Hajduczek, E.³

17
- 1342323670
- Nakonechna O., Cselle T., Morstein M., and Karimi A. Thin Solid Films 447-448 (2004) 406
- (2004) Thin Solid Films , vol.447-448 , pp. 406
- Nakonechna, O.¹ Cselle, T.² Morstein, M.³ Karimi, A.⁴

18
- 28944435085
- Kim S.K., Vinh P.V., Kim J.H., and Ngoc T. Surf. Coat. Technol. 200 (2005) 1391
- (2005) Surf. Coat. Technol. , vol.200 , pp. 1391
- Kim, S.K.¹ Vinh, P.V.² Kim, J.H.³ Ngoc, T.⁴

19
- 43949123817
- Chang C.L., Lin C.T., Tsai P.C., Ho W.Y., and Wang D.Y. Thin Solid Films 516/16 (2008) 5324
- (2008) Thin Solid Films , vol.516-16 , pp. 5324
- Chang, C.L.¹ Lin, C.T.² Tsai, P.C.³ Ho, W.Y.⁴ Wang, D.Y.⁵

20
- 27744514649
- Chang C.L., Ho W.Y., Jao J.Y., Chang T.C., and Wang D.Y. Diamond Relat. Mater. 14 11-12 (2005) 2127
- (2005) Diamond Relat. Mater. , vol.14 , Issue.11-12 , pp. 2127
- Chang, C.L.¹ Ho, W.Y.² Jao, J.Y.³ Chang, T.C.⁴ Wang, D.Y.⁵

21
- 10844239699
- Barshilia H.C., Surya Prakash M., Jain A., and Rajam K.S. Vacuum 77 (2005) 169
- (2005) Vacuum , vol.77 , pp. 169
- Barshilia, H.C.¹ Surya Prakash, M.² Jain, A.³ Rajam, K.S.⁴

22
- 0033364925
- Huang J.H., Tasi Y.P., and Yu G.P. Thin Solid Films 355-356 (1999) 440
- (1999) Thin Solid Films , vol.355-356 , pp. 440
- Huang, J.H.¹ Tasi, Y.P.² Yu, G.P.³

23
- 33644663828
- Winkelmann A., Cairney J.M., Hoffman M.J., Martin P.J., and Bendavid A. Surf. Coat.Technol. 200 (2006) 4213
- (2006) Surf. Coat.Technol. , vol.200 , pp. 4213
- Winkelmann, A.¹ Cairney, J.M.² Hoffman, M.J.³ Martin, P.J.⁴ Bendavid, A.⁵

24
- 29244447078
- Martin P.J., Bendavid A., Cairney J.M., and Hoffman M. Surf. Coat.Technol. 200 (2005) 2228
- (2005) Surf. Coat.Technol. , vol.200 , pp. 2228
- Martin, P.J.¹ Bendavid, A.² Cairney, J.M.³ Hoffman, M.⁴

25
- 0034292444
- Nose M., Zhou M., Nagae T., Mae T., Yokota M., and Saji S. Surf. Coat.Technol. 132 (2000) 163
- (2000) Surf. Coat.Technol. , vol.132 , pp. 163
- Nose, M.¹ Zhou, M.² Nagae, T.³ Mae, T.⁴ Yokota, M.⁵ Saji, S.⁶

26
- 0037011109
- Kim S.H., Kim J.K., and Kim K.H. Thin Solid Films 420-421 (2002) 360
- (2002) Thin Solid Films , vol.420-421 , pp. 360
- Kim, S.H.¹ Kim, J.K.² Kim, K.H.³

27
- 0042858383
- Nose M., Deguchi Y., Nae T., Honbo E., Nagae T., and Nogi K. Surf. Coat.Technol. 174-175 (2003) 261
- (2003) Surf. Coat.Technol. , vol.174-175 , pp. 261
- Nose, M.¹ Deguchi, Y.² Nae, T.³ Honbo, E.⁴ Nagae, T.⁵ Nogi, K.⁶

28
- 0347354999
- Jiang N., Shen Y.G., Mai Y.W., Chan T., and Tung S.C. Mater. Sci. Eng. B106 (2004) 163
- (2004) Mater. Sci. Eng. , vol.B106 , pp. 163
- Jiang, N.¹ Shen, Y.G.² Mai, Y.W.³ Chan, T.⁴ Tung, S.C.⁵

29
- 0003459529
- Chastain J. (Ed), Perkin-Elmer Corporation, Eden Prairie
- In: Chastain J. (Ed). Handbook of X-ray Photoelectron Spectroscopy (1992), Perkin-Elmer Corporation, Eden Prairie
- (1992) Handbook of X-ray Photoelectron Spectroscopy

30
- 13544250169
- Ishihara M., Yumoto H., Tsuchiya T., and Akashi K. Thin Solid Films 281-282 (1996) 321
- (1996) Thin Solid Films , vol.281-282 , pp. 321
- Ishihara, M.¹ Yumoto, H.² Tsuchiya, T.³ Akashi, K.⁴

31
- 0032676642
- Park B.H., Kim Y.I., and Kim K.H. Thin Solid Films 348 (1999) 210
- (1999) Thin Solid Films , vol.348 , pp. 210
- Park, B.H.¹ Kim, Y.I.² Kim, K.H.³

32
- 0035465769
- Niedhofer A., Bolom T., and Nesladek P. Surf. Coat. Technol. 146-147 (2001) 183
- (2001) Surf. Coat. Technol. , vol.146-147 , pp. 183
- Niedhofer, A.¹ Bolom, T.² Nesladek, P.³

33
- 0342357272
- Sun X., Reid J., Kolawa E., and Nicolet M.-A. J. Appl. Phys. 81 2 (1997) 656
- (1997) J. Appl. Phys. , vol.81 , Issue.2 , pp. 656
- Sun, X.¹ Reid, J.² Kolawa, E.³ Nicolet, M.-A.⁴

34
- 0037472741
- Durand-Drouhin O., Santana A.E., Karimi A., Derflinger V.H., and Schütze A. Surf. Coat. Technol. 163-164 (2003) 260
- (2003) Surf. Coat. Technol. , vol.163-164 , pp. 260
- Durand-Drouhin, O.¹ Santana, A.E.² Karimi, A.³ Derflinger, V.H.⁴ Schütze, A.⁵

35
- 1342323670
- Nakonechna O., Cselle T., Morstein M., and Karimi A. Thin Solid Films 447-448 (2004) 406
- (2004) Thin Solid Films , vol.447-448 , pp. 406
- Nakonechna, O.¹ Cselle, T.² Morstein, M.³ Karimi, A.⁴

36
- 84975434808
- Stern M., and Geary A.L. J. Electrochem. Soc. 104 1 (1957) 56-63
- (1957) J. Electrochem. Soc. , vol.104 , Issue.1 , pp. 56-63
- Stern, M.¹ Geary, A.L.²

37
- 0034303926
- Wilson S., and Alpas A.T. Wear 245 (2000) 223
- (2000) Wear , vol.245 , pp. 223
- Wilson, S.¹ Alpas, A.T.²

38
- 4243611622
- Delplancke-Ogletree M.P., and Monteiro O.R. Surf. Coat. Technol. 108-109 (1998) 484
- (1998) Surf. Coat. Technol. , vol.108-109 , pp. 484
- Delplancke-Ogletree, M.P.¹ Monteiro, O.R.²

39
- 0032077749
- Takadoum J., Houmid-Bennani H., and Mairey D. J. Eur. Ceram. Soc. 18 (1998) 553
- (1998) J. Eur. Ceram. Soc. , vol.18 , pp. 553
- Takadoum, J.¹ Houmid-Bennani, H.² Mairey, D.³

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