On the behaviour of indentation fracture in TiAlSiN hard thin films

Thin Solid Films

Volumn 447-448, Issue , 2004, Pages 406-412

  Nakonechna, O ^a   Cselle, T ^b   Morstein, M ^b   Karimi, A ^a  

^a EPFL   (Switzerland)

^b Platit AG Grenchen   (Switzerland)

Author keywords

Fracture toughness; Nanocomposite; Nanoindentation; Thin films; TiAlSiN

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRACKS; DEPOSITION; FRACTURE TOUGHNESS; HALL EFFECT; HARDNESS; INDENTATION; MORPHOLOGY; MULTILAYERS; NANOSTRUCTURED MATERIALS; SILICON; SOLID SOLUTIONS; TITANIUM COMPOUNDS; X RAY DIFFRACTION ANALYSIS;

NANOINDENTATION; TIALSIN;

THIN FILMS;

EID: 1342323670     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(03)01072-1     Document Type: Conference Paper

References (26)

1. Munz W.D. J. Vac. Sci. Technol. A. 4:1986;2717.
2. Sproul W.D., Graham M.E., Wong M.S., Rudnik P.J. Surf. Coat. Technol. 61:1993;139.
3. Knotek O., Bohmer M., Leyendecker T. J. Vac. Sci. Technol. A. 4:1986;2695.
4. Tanaka Y., Gur T.M., Kelly M., Hagstrom S.B., Ikeda T., Wakihira K., Satoh H. J. Vac. Sci. Technol. A. 10:1992;1749.
5. Kimura A., Hasegawa H., Yamada K., Suzuki T. Surf. Coat. Technol. 120/121:1999;438.
6. O. Knotek, R. Elsing, M. Atzor, H.G. Prendel. In: K.C. Ludema (Ed.), Proceeedings of the Wear of materials Conference, April 9-13, Denver, Colorado, (1989) p. 557.
7. Vancoille E., Celis J.P., Roos J.R. This Solid Films. 224:1993;168.
8. Veprek S. Thin Solid Films. 317:1998;1564.
9. Tuck J.R., Korsunsky A.M., Bhat D.G., Bull S.J. Surf. Coat. Technol. 139:2001;63.
10. Oliver W.C., Pharr G.M. J. Mater. Res. 7:1992;1564.
11. Saha R., Nix W.D. Acta Mater. 50:2002;23.
12. Karimi A., Wang Y., Cselle T., Morstein M. This Solid Films. 420-421:2002;275.
13. Toth L.E. Transition Metal Carbides and Nitrides. 1971;279 Academic Press Inc, New York and London.
14. Klug H.P., Alexander L.E. X-ray Diffraction Procedures for Polycrystalline and Amorphous Materials. 1974;1974 Wiley, New York, USA.
15. Villars P., Calvert L.D. Pearson's Handbook of Crystallographic Data for Intermetallic Phases. 1985;American Society of Metals, Metals Park, Ohio, USA.
16. W.B. Pearson (1972), The Crystal Chemistry and Physics of Metals and Alloys, New York, USA: Wiley-Interscience, The 12-coordinated metallic radii in Table 4-4 of this book have been taken from: E. Teatum, K. Gschneidner, J. Waber, Report LA-2345, US Department of Commerce, Washington, D.C., USA, 1960.
17. Massalski T.B. Massalski T.B. Binary Alloy Phase Diagrams. 2nd ed: 1996;ASM International, Materials Park, Ohio, USA. plus updates on CD-ROM, 1996.
18. Hono K., Zhang Y., Tsai P., Inoue A., Sakurai T. Scripta Met. Mat. 32:1995;191.
19. Á. Rèvèsz, L.K. Varga, P.M. Nagy, J. Lendvai, I. Bakonyi. Mater. Sci. Eng. A (2003), in press.
20. Alcata J., Barone A.C., Anglada M. Acta Mater. 48:2000;3451.
21. Zhou M., Makino Y., Nose M., Nogi K. Thin Solid Films. 339:1999;203.
22. Shojaei O.R., Karimi A. Thin Solid Films. 332:1998;202.
23. Marshall D.B., Lawn B.R., Evans A.G. J. Am. Ceram. Soc. 65:1982;561.
24. Lawn B.R. Fracture of Brittle Solids. 2nd ed: 1993;378 Cambrige University Press, Cambrige, UK.
25. Tsui T.Y., Vlassak J., Nix W.D. J. Mater. Res. 14:1999;2204.
26. Malzbender J., de With G. Surf. Coat. Technol. 135:2000;60.