A theoretical model for surface-stress piezoresistive microcantilever biosensors with discontinuous layers

Sensors and Actuators, B: Chemical

Volumn 138, Issue 2, 2009, Pages 598-606

  Wang, Zheyao ^a   Zhou, Youzheng ^a   Wang, Chaonan ^a   Zhang, Qi ^a   Ruan, Wenzhou ^a   Liu, Litian ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

Biosensor; Laminated plate theory; Microcantilever; Piezoresistor

Indexed keywords

BIOSENSOR; CLOSED-FORM EQUATIONS; DESIGN AND OPTIMIZATIONS; FINITE ELEMENTS; IN-BETWEEN; LAMINATED PLATE THEORY; MICROCANTILEVER; MICROCANTILEVER BIOSENSORS; PIEZO-RESISTIVE; PIEZO-RESISTORS; PIEZORESISTOR; SEGMENT MODELS; SILICON DIOXIDES; SURFACE STRESS; THEORETICAL MODELS;

ATOMIC FORCE MICROSCOPY; CHEMICAL SENSORS; COMPOSITE MICROMECHANICS; LAMINATING; SIGNAL TRANSDUCTION; SILICA; SURFACE PROPERTIES; TWO DIMENSIONAL;

BIOSENSORS;

EID: 64549112127     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2009.02.046     Document Type: Article

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