Simulation of SiO 2-based piezoresistive microcantilevers

Sensors and Actuators, A: Physical

Volumn 125, Issue 2, 2006, Pages 526-533

  Chivukula, Venkata ^a   Wang, Ming ^a   Ji, Hai Feng ^a,b   Khaliq, Abdul ^a,c   Fang, Ji ^a,c   Varahramyan, Kody ^a,c,d  

^a LOUISIANA TECH UNIVERSITY   (United States)

^b Institute for Micromanufacturing   (United States)

^c LOUISIANA TECH UNIVERSITY   (United States)

^d Department of Electrical Engineering ^*

Author keywords

Microcantilever; Piezoresistance; Surface stress

Indexed keywords

CANTILEVER DEFLECTION; MICROCANTILEVERS; PIEZORESISTANCE; SURFACE STRESS;

COMPUTER SIMULATION; FINITE ELEMENT METHOD; SEMICONDUCTOR DOPING; SILICA; TEMPERATURE CONTROL;

PIEZOELECTRIC DEVICES;

EID: 29144519321     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.08.038     Document Type: Article

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