Design and analysis of piezoresistive microcantilever for surface stress measurement in biochemical sensor

Sensors and Actuators, B: Chemical

Volumn 120, Issue 2, 2007, Pages 736-744

  Yang, S M ^a   Yin, T I ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

Biochemical sensors; Piezoresistive microcantilever; Surface stress; Thermal effect

Indexed keywords

ATOMIC FORCE MICROSCOPY; BIOCHEMISTRY; INSULATION; PRODUCT DESIGN; SENSITIVITY ANALYSIS; STRESS ANALYSIS; THERMAL EFFECTS;

BIOCHEMICAL SENSORS; PIEZORESISTIVE MICROCANTILEVER; SURFACE STRESSES;

CHEMICAL SENSORS;

EID: 33845659457     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2006.03.053     Document Type: Article

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