Development of a double-microcantilever for surface stress measurement in microsensors

Sensors and Actuators, B: Chemical

Volumn 121, Issue 2, 2007, Pages 545-551

  Yang, S M ^a   Yin, T I ^a   Chang, C ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

Piezoresistive microcantilever; Surface stress measurement

Indexed keywords

CHEMICAL SENSORS; MATHEMATICAL MODELS; MICROSENSORS; PIEZOELECTRIC DEVICES; SENSITIVITY ANALYSIS; STRESS ANALYSIS;

BIOCHEMICAL REACTIONS; PIEZORESISTIVE MICROCANTILEVERS; SURFACE STRESS MEASUREMENT;

CANTILEVER BEAMS;

EID: 33846648494     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2006.04.108     Document Type: Article

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