Modeling piezoresistive microcantilever sensor response to surface stress for biochemical sensors

IEEE Sensors Journal

Volumn 8, Issue 8, 2008, Pages 1404-1410

  Goericke, Fabian T ^a   King, William P ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

Atomic force microscope; Cantilever; Chemical sensor; Piezoresis; Surface stress

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHEMICAL SENSORS; DETECTORS; FINITE ELEMENT METHOD; IMAGING TECHNIQUES; MICROSCOPIC EXAMINATION; MOLECULAR BEAM EPITAXY; SCANNING PROBE MICROSCOPY; SEMICONDUCTING SILICON; SENSORS; STRESSES; SURFACE PROPERTIES;

ATOMIC FORCE (AF); BIO CHEMICAL SENSORS; BIOCHEMICAL SENSING; DESIGN GUIDELINES; FINITE ELEMENT (FE) SIMULATIONS; LOADING CONDITIONS; MECHANICAL STRESSING; PIEZO RESISTORS; PIEZO-RESISTIVE CANTILEVERS; PIEZO-RESISTORS; PIEZORESISTIVE MICROCANTILEVER; SURFACE STRESS LOADING; SURFACE STRESSES;

PHOTORESISTS;

EID: 47849109729     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2008.920706     Document Type: Article

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