Closed-loop control of a long-range micropositioner using integrated photodiode sensors

Sensors and Actuators, A: Physical

Volumn 151, Issue 2, 2009, Pages 187-194

  Beyaz, Mustafa Ilker ^a   McCarthy, Matthew ^a   Ghalichechian, Nima ^a   Ghodssi, Reza ^a  

^a UNIVERSITY OF MARYLAND   (United States)

Author keywords

Closed loop control; Feedback sensors; MEMS; Micropositioners; Photodiodes

Indexed keywords

ACTUATION VOLTAGES; CLOSED LOOPS; CLOSED-LOOP CONTROL; CRITICAL FUNCTIONS; FEEDBACK SENSORS; FRAME OF REFERENCES; INTEGRATED PHOTODIODES; MAXIMUM SPEED; MICRO BALL BEARINGS; MICROPOSITIONER; MICROPOSITIONERS; OPEN LOOPS; POSITION CONTROL SYSTEMS; POSITION-SENSING; PROPORTIONAL CONTROLS; SETTLING TIME; SYNCHRONOUS MOTIONS; VARIABLE-CAPACITANCE MICROMOTOR;

CLOSED LOOP CONTROL SYSTEMS; ELECTROSTATIC ACTUATORS; HETEROJUNCTION BIPOLAR TRANSISTORS; LAWS AND LEGISLATION; MEMS; MICROELECTROMECHANICAL DEVICES; MICROSYSTEMS; PHOTODIODES; ROBUST CONTROL; SENSORS;

FEEDBACK;

EID: 64549087546     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2009.02.020     Document Type: Article

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