Toward an autonomous electrostatic micromotor: Integrated feedback control

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2008, Pages 483-486

  Beyaz, M I ^a   Ghalichechian, N ^a   Ghodssi, R ^a  

^a UNIVERSITY OF MARYLAND   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADAPTIVE CONTROL SYSTEMS; DECISION MAKING; ELECTROSTATICS; FEEDBACK CONTROL; HETEROJUNCTION BIPOLAR TRANSISTORS; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; OPTICAL DESIGN; PHOTODIODES; POSITION CONTROL; PROBLEM SOLVING; REACTIVE ION ETCHING; SPEED; STEPPING MOTORS;

AUTONOMOUS DECISION; CON TROL ALGORITHMS; CONTINUOUS MOTION; FEED BACK LOOPS; FEEDBACK-CONTROL SYSTEMS; INTEGRATED PHOTODIODES; INTERNATIONAL CONFERENCES; MECHANICAL MOTIONS; MICRO BALL BEARINGS; MICRO MOTORS; MICRO-CONTROLLER; MICRO-ELECTRO MECHANICAL SYSTEMS; MICROMACHINES; OPEN LOOPS; POSITION SENSING; RELIABLE OPERATIONS; SUPERIOR PERFORMANCE;

COMPOSITE MICROMECHANICS;

EID: 50149116366     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2008.4443698     Document Type: Conference Paper

References (6)

1. X. Wang, S. Cui, S. Cheng, "Advantages of electrostatic micromotor and its application to medical instruments", Conference Record of the 2002 IEEE Industry Applications Conference, Pittsburgh, PA, USA, 2002, vol. 4, pp. 2466-2468.
2. C.H. Ahn, Y.J. Kim, M.G. Allen, "A planar variable reluctance magnetic micromotor with fully integrated stator and coils", Journal of Microelectromechanical Systems, Dec 1993, vol.2, no.4, pp.165-173.
3. N. Ghalichechian, A. Modafe, J.H. Lang, R. Ghodssi, "Dynamic characterization of a linear electrostatic micromotor supported on microball bearings", Sensors and Actuators A, 16 May 2007, vol. 136, no.2, pp. 496-503.
4. N. Ghalichechian, M.I. Beyaz, R. Ghodssi, "A rotary micromotor supported on microball bearings", The 14th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '07), June 10-14, 2007, pp.1123-1126.
5. N.K. Rao, D.K. Hartsfield, A. Purushotham, S.L. Garverick, "An IC for closed-loop micromotor control", 1995 URSI International Symposium on Signals, Systems and Electronics, 1995, pp. 563-566.
6. S.E. Lyshevski, "Modeling and control of MEMS with high speed synchronous micromotors and controllers/drivers-on-VLSI-chip ICs", Energy Conversion and Management, March 2003, vol. 44, no. 5, pp. 667-679.