Toward smart micromachines with integrated feedback control

2007 International Semiconductor Device Research Symposium, ISDRS

Volumn , Issue , 2007, Pages

  Beyaz, Mustafa Ilker ^a   Ghalichechian, Nima ^a   Ghodssi, Reza ^a  

^a UNIVERSITY OF MARYLAND   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 44949167675     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ISDRS.2007.4422471     Document Type: Conference Paper

References (3)

1. N. Ghalichechian, et al., "Dynamic Characterization of a Linear Variable-Capacitance Micromotor", Hilton Head Island, SC, USA, pp. 19-22, June 4-8, 2006.
2. th IEEE Industrial Electronics Society, NJ, USA, pp.347-352, 2003.
3. A. Purushotham, et al., "A Closed Loop Micromotor Control System", IEEE International Symposium on Circuits and Systems, NY, USA, vol. 4, pp.209-212, 1996.