Measurement and modeling of friction in linear and rotary micromotors supported on microball bearings

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2008, Pages 507-510

  Ghalichechian, N ^a   McCarthy, M ^a   Beyaz, M I ^a   Ghodssi, R ^a  

^a UNIVERSITY OF MARYLAND   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BEARINGS (STRUCTURAL); COMPOSITE MICROMECHANICS; MANGANESE COMPOUNDS; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; REACTIVE ION ETCHING; TRIBOLOGY;

AND MODELING; CO-EFFICIENT OF FRICTION; DASHPOT; FRICTION FORCES; FRICTIONAL FORCES; INTERNATIONAL CONFERENCES; MICRO BALL BEARINGS; MICRO-ELECTRO MECHANICAL SYSTEMS; MICRO-MOTORS; NORMAL FORCES; ROLLING VELOCITY;

FRICTION;

EID: 50149087338     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2008.4443704     Document Type: Conference Paper

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