Stick-slip actuation of electrostatic stepper micropositioners for data storage - The μW alker

Proceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005

Volumn , Issue , 2005, Pages 81-86

  Patrascu, Mihai ^b   Stxamigioli, Stefano ^a,b  

^a IEEE   (Netherlands)

^b UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

DATA PROBES; ELECTROSTATIC STEPPERS; MICROPOSITIONERS; SLIP EFFECTS;

ACTUATORS; DATA STORAGE EQUIPMENT; PROBES; VOLTAGE MEASUREMENT;

ELECTROSTATIC DEVICES;

EID: 33749050573     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICMENS.2005.112     Document Type: Conference Paper

References (8)

1. L. Abelmann, T. Bolhuis, A. M. Hoexum, G. J. M. Krijnen, and J. C. Lodder. Large capacity probe recording using storage robots. IEE Proc.-Sci. Meas. Technol, 150(5):218-221, September 2003.
2. L. R. Carley, J. A. Bain, G. K. Fedder, D. W. Greve, D. F. Guillou, L. Abelmann, and S. Min. Single-chip computers with microelectromechanical systems-based magnetic memory (invited). Journal of Applied Physics, 87(9):6680-6685, 05 2000.
3. E. Eleftheriou, P. Bächtold, G. Cherubini, A. Dholakia, C. H. T. Loeliger, and e. A. Pantazi. A nanotechnology-based approach to data storage, volume 29, pages 3-9. Morgan Kaufmann, San Francisco, August 2003.
4. N. E. Ligterink, M. Patrascu, P. C. Breedveld, and S. Stramigioli. An energy-based electroelastic beam model for MEMS applications. September 2004. Accepted for publication.
5. J. A. Pelesko and D. H. Bernstein. Modeling MEMS and NEMS. Chapman & Hall/CRC, 2003. ISBN: 1-58488-306-5.
6. E. Sarajlic, E. Berenschot, H. Fujita, G. Krijnen, and M. Elwenspoek. Bidirectional electrostatic linear shuffle motor with two degrees of freedom. MEMS 2005 - 18th IEEE International Conference on Micro Electro Mechanical Systems, Miami, pages 391-394, January 2005.
7. E. Sarajlic, E. Berenschot, N. Tas, H. Fujita, G. Krijnen, and M. Elwenspoek. High performance bidirectional electrostatic inchworm motor fabricated by trench isolation technology. TRANSDUCERS 05 - Int. Conf. on Solid State Sensors and Actuators - Seoul, Korea, July 2005. Accepted.
8. P. Vettiger, G. Cross, M. Despont, U. Drechsler, U. Dürig, B. Gotsmann, W. Häberle, and M. A. L. e.a. The "Millipede" - nanotechnology entering data storage. IEEE Trans. Nanotechnol., 1:39-55, 2002.