Guided-wave optical switch controlled by a micro-electro-mechanical cantilever

Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS

Volumn 1, Issue , 2000, Pages 50-51

  Shubin, Ivan ^a   LiKamWa, Patrick ^a  

^a UNIVERSITY OF CENTRAL FLORIDA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONTINUOUS WAVE LASERS; ETCHING; INTEGRATED OPTICS; MICROELECTROMECHANICAL DEVICES; OPTICAL WAVEGUIDES; PHOTOLITHOGRAPHY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICA; SILICON; SILICON NITRIDE; SOLID STATE LASERS; SUBSTRATES;

GUIDED WAVE OPTICAL SWITCH; MICROELECTROMECHANICAL CANTILEVER; OPTO MECHANICAL SWITCH;

OPTICAL SWITCHES;

EID: 0034482193     PISSN: 10928081     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)