Electrical characterization of benzocyclobutene polymers for electric micromachines

IEEE Transactions on Device and Materials Reliability

Volumn 4, Issue 3, 2004, Pages 495-508

  Modafe, Alireza ^a   Ghalichechian, Nima ^a   Kleber, Benjamin ^a   Ghodssi, Reza ^a  

^a UNIVERSITY OF MARYLAND   (United States)

Author keywords

Benzocyclobutene (BCB); CYCLOTENE; Dielectric insulating layer; Electric micromachines; Electrical characterization

Indexed keywords

ABSORPTION; ATMOSPHERIC HUMIDITY; DIELECTRIC MATERIALS; ELECTRIC INSULATION; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; RELIABILITY; SILICATES; STATISTICAL METHODS;

BENZOCYCLOBUTANE (BCB); CYCLOTENE; DIELECTRIC INSULATING LAYERS; ELECTRIC MICROMACHINES; ELECTRICAL CHARACTERIZATION;

AROMATIC HYDROCARBONS;

EID: 11144245895     PISSN: 15304388     EISSN: None     Source Type: Journal    
DOI: 10.1109/TDMR.2004.830289     Document Type: Article

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